Dimension 3100

The Dimension 3100 is capable of that the Dimension 3000, however where the 3100 outperforms the 3000 is in its repeatability. The improved stage controller allows for superior repeatability by more accurately locating the desired scanning area of a sample.

Key Specifications:

• Noise:

  • <0.5 Å RMS in vertical (Z) dimension when used with an optional vibration isolation system. (75 dbc ambient white noise)

• Microscope:

  • Lateral accuracy typically within 1%, Maximum 2%

  • Provides full 16-bit resolution on all axes for all scan sizes and offsets

• Tip/Sample Viewing:

  • 180 to 810 μm optical field of view

  • Motorized zoom and focus

  • 2 μm (highest) resolution at smallest field of view

• X-Y Stage:

  • 100 mm by 120 mm inspectable area

  • 2 μm linear positioning resolution

  • 4 μm in the X-direction and 6 μm in the Y-direction for bidirectional repeatability

• Sample Size:

  • ≤ 200 mm diameter wafer with X-Y stage

  • 12 mm thick (taller samples can be accommodated with customized chucks)

• Power:

  • 1800 W peak consumption

  • 100, 120 or 220-240 V single phase

  • 50 or 60 Hz

Recommended hardware for a optimal system:

• Nanoscope IIIa

• Windows 7 Computer

The Dimension 3100 can also operate with: Nanoscope models III, IV, IVa, and V; Windows XP computers.