Dimension 5000

With unparalleled precision and efficiency, the Dimension 5000 AFM is perfect for larger samples that require accurate imaging. The Dimension 5000 is capable of scanning the entire surface of an 200mm wafer. Utilizing encoders, the Dimension 5000 is capable of closed loop positioning, allowing for unrivaled repeatability when scanning a large sample.

Key Specifications:

• Noise:

  • <0.5 Å RMS in vertical (Z) dimension when used with an optional vibration isolation system. (75 dbc ambient white noise)

• Microscope:

  • Lateral accuracy typically within 1%, Maximum 2%

  • Provides full 16-bit resolution on all axes for all scan sizes and offsets

• Tip/Sample Viewing:

  • 150 to 675 μm optical field of view

  • Motorized zoom and focus

  • 1.5 μm (highest) resolution at smallest field of view

• X-Y Stage:

  • 200 mm square inspectable area

  • 1 μm linear positioning resolution

  • 2 μm bidirectional repeatability

• Sample Size:

  • ≤ 200 mm diameter square with X-Y stage

  • ≤ 300 mm wafer with rotary stage

  • 12 mm thick (taller samples can be accommodated with customized chucks)

• Power:

  • 1800 W peak consumption

  • 100, 120 or 220-240 V single phase

  • 50 or 60 Hz

Recommended hardware for a optimal system:

• Nanoscope V

• Windows 7 Computer

• Closed Loop Scanner

The Dimension 5000 can also operate with: Nanoscope models IIIa, IV, and IVa; Windows XP computers; open loop and hybrid scanners.