Dimension 3000

The Dimension 3000 is an easily operated, dependable AFM. The imaging quality is comparable to that of the Dimension 3100.

Key Specifications:

• Noise:

  • <0.5 Å RMS in vertical (Z) dimension when used with an optional vibration isolation system. (75 dbc ambient white noise)

• Microscope:

  • Lateral accuracy typically within 1%, Maximum 2%

  • Provides full 16-bit resolution on all axes for all scan sizes and offsets

• Tip/Sample Viewing:

  • 180 to 810 μm optical field of view

  • Motorized zoom and focus

  • 2 μm (highest) resolution at smallest field of view

• X-Y Stage:

  • 100 mm by 120 mm inspectable area

• Sample Size:

  • ≤ 200 mm diameter wafer with X-Y stage

  • 12 mm thick (taller samples can be accommodated with customized chucks)

• Power:

  • 1800 W peak consumption

  • 100, 120 or 220-240 V single phase

  • 50 or 60 Hz

Recommended hardware for a optimal system:

• Nanoscope IIIa

• Windows 7 Computer

The Dimension 3000 can also operate with: Nanoscope models III, IV, IVa, and V; Windows XP computers.